Measure Thickness with Filmetrics® F54-XY

上海仪舶实验室自动化 25-02-05 10:33:10

Measure Thickness with Filmetrics® F54-XY

The F54-XY advanced spectral reflectance device allows for the easy mapping of thin-film thickness on samples up to 300 mm. The F54-XY-200 configurations measure samples up to 200 mm using a motorized X-Y stage that moves automatically to predefined measurement positions, allowing for thickness measurements as fast as two points per second.

The F54-XYT-300 configuration has an extra high-performance rotary stage that supports measurements on 300 mm wafers.

With the automated film thickness mapping system, users can choose from hundreds of standard polar, rectangular, or linear map patterns or design their own with an unlimited number of measurement points. Pattern recognition software enables the measurement of both patterned and unpatterned samples.

The F54-XY variants differ largely in terms of film thickness and wavelength range. Shorter wavelengths (e.g., F54-XY-200-UV) are often required for measuring thinner films, but longer wavelengths can be used to measure thicker, rougher, or more opaque films.

Measure Thickness with Filmetrics® F54-XY-200

Image Credit: KLA Instruments™

Model Specifications

Source: KLA Instruments™

Model Thickness Range* Wavelength Range
F54-XY 20 nm - 50 µm 380-1050 nm
F54-XY-UV 4 nm - 35 µm 190-1100 nm
F54-XY-NIR 100 nm - 120 µm 950-1700 nm
F54-XY-EXR 20 nm - 120 µm 380-1700 nm
F54-XY-UVX 4 nm - 120 µm 190-1700 nm

*Material and objective dependent

Thickness Measurement Range

Measure Thickness with Filmetrics® F54-XY-200

Image Credit: KLA Instruments™

F54-XY Options

NIST-Traceable Thickness Standard

High-Pass Filter Wheel

Pattern Recognition Software

Motorized Turret

What is Included

SiO2 on Si Thickness standard

Integrated spectrometer/light source unit

Integrated on-board Silicon reflectance standard

FILMapper measurement software

Vacuum pump

Additional Perks

Online “Hands On” support

Library with over 130 materials included with every system, as well as access to hundreds more

Applications Engineers are ready for immediate 24-hour help (Mon-Fri)

Common Optional Accessories

NIST-traceable thickness standard.

NIST-traceable thickness standard. Image Credit: KLA Instruments™

[Measure Thickness with Filmetrics® F54-XY]相关推荐
CM Labs

CM Labs

For over 15 years, CM Labs Simulations Inc. has been delivering virtual environments that promote……...

Bayer AG

Bayer AG

Bayer successfully completed the acquisition of Monsanto on Thursday. Shares in the U.S. company ……...

KLA Instruments™

KLA Instruments™

KLA Instruments encompasses a broad portfolio of surface metrology and defect inspection solution……...

GeoSIG Ltd

GeoSIG Ltd

GeoSIG provides earthquake, seismic, structural, dynamic and static monitoring and measuring solu……...

EPSON Robots

EPSON Robots

The EPSON Factory Automation Division is one of the many product divisions within the multi-billi……...

今日仪器
  1. MROcrib

    MROcrib

    MROcrib is dedicated for customers of Industrial & Electric Supply Co. The products offered are primarily used for the repair and maintenance of production related equipment including products ……

    进口品牌 2026-07-28

  2. Eidesvik Offshore

    Eidesvik Offshore

    Eidesvik Offshore ASA owns and operates a worldwide fleet of purpose-built vessels, providing ship services for offshore supply and transport of pipes, oil recovery and stand-by, maintenance and in……

    进口品牌 2026-07-28

  3. Trojan Technologies

    Trojan Technologies

    Trojan Technologies enables customers to meet their water quality objectives by providing eco-efficient solutions that reduce and recover costs, energy, resources and space. Collaboratively solving……

    进口品牌 2026-07-28

返回顶部小火箭