Nano-Master, Inc.

上海仪舶实验室自动化 25-05-07 15:50:34

Nano-Master, Inc.

Nano-Master, Inc. serves a broad range of industries and markets including Semiconductor, MEMS, Opto-electronics, Nano Technology, Manufacturing and R&D Markets. It provides state of art solutions in plasma processing, sputtering, thermal and e-beam evaporation, ion beam etching, megasonic wafer/mask cleaning, single wafer chemical processing and ultra-pure chemical handling technologies.

Nano-Master, Inc. manufactures a complete line of sputtering systems with reactive sputtering, co-sputtering and combinatorial sputtering, PECVD tools, RIE and Deep RIE systems along with thermal and e-beam evaporators, and single wafer megasonic cleaners. Our products include :

Dual PECVD&RIE System

Flowmeters

Pressure Regulators

Optical Sensors

Capacitive Sensors

Sputtering with Auto Load-lock and Elevator

PECVD System for CNT.

Primary Activity

Material ManufacturerManufacturer of a sputtering systems, PECVD tools, RIE and Deep RIE systems.

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