SUSS MicroTec
SUSS MicroTec Group is a supplier of equipment and process solutions for microstructuring applica……...
MTI Instruments offers a wide range of standard capacitance probes that can operate with any of the Accumeasure series of amplifiers. MTI also designs custom capacitive sensors to meet customers’ specific measurement needs.
Key Features
The standard features of the ACCUMEASURE standard capacitance probes are:
Accuracy: ±0.02% FSR or better
Cable and probe temperature rating: -130°C (-202°F) to 200°C (392°F)
Connector temperature rating: -65°C (-85°F) to 85°C(185°F)
Resolution RMS: (0.000423 x bandwidth in Hz + 1.2) x 0.00002 x FSR in mils or microns
Probe and cable interchangeability: Accurate to within ± 0.5% without recalibration
Standard amplifier filter bandwidth: 500Hz
Optional filter bandwidth: 10Hz, 100Hz, 1kHz, 2kHz, 5kHz and 660Hz-Bessel
Pressure rating standard: 1400kPa (200 psig) - (not applicable to HT Probes)
Material: stainless steel construction, no active internal electronics
Standard coax cable for integral lead type probes: 2.4m length
Applications
The applications of the ACCUMEASURE standard capacitance probes are:
Microscope focus
Lens alignment
Part profiling
Part tilt
Vibration measurement
Semiconductor wafer thickness
Piezo stage displacement
Brake rotor warp and thickness
Sheet metal thickness
Photovoltaic wafers
Computer disk run out and thickness
Measuring the Step Height Thickness of Non- Woven Conductive Films
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