Hermary
Hermary provides advanced3D machine visionscanners for system integrators, machine builders, and ……...
ACULIGNER™ from Brooks Automation, Inc.
The Brooks InLigner coordinates with the MagnaTran robot to provide wafer centering and edge fiducial orientation for 100 to 200 mm semi standard and Jeida standard wafers with either notch or flat edge fiducials. Special configurations are also available for use with transparent and/or square substrates, including quartz masks up to 6 inches square. To maximize the use of transport chamber facets for process modules, the InLinger mounts between the load lock and the transport chamber and allows access to the wafers in the lock.
Key Features
Coordinates directly with the MagnaTran 7 robot to provide orientation and centering within the vacuum envelope
Mounts in line with load lock to maximize facet availability for process modules
Offers capability for transparent and/or square substrates
Field proven
CE/S2 compliant
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