Amtech Systems

The diffusion business is comprised of two operations. The first, along with the company’s headquarters, is located in Tempe, Arizona, USA. The Tempe operation designs, manufactures and sells IBAL Automation, robotic systems for automating the loading and unloading of silicon wafers from all brands of existing and new semiconductor diffusion furnaces operating at temperatures up to 1350 degrees centigrade. This operation also manufactures patented ATMOSCAN SYSTEMS, especially designed cantilevered diffusion process tubes for controlling oxygen, moisture, and particles in the environment surrounding the silicon wafers and protecting them from the sudden change in temperature as they are unloaded from the furnace core.These products also are sold as complete systems in the form of class 1 load-stations, and in conjunction with the sale of diffusion furnaces.