Automated Particle Detection from Dr. Schenk GmbH

上海仪舶实验室自动化 26-01-29 16:43:35

Automated Particle Detection from Dr. Schenk GmbH

The automated Particle Detection System of Dr. Schenk. Pollux enables fabs to perform a complete inspection on each reticle prior to its use. This approach provides amore cost-effective and more reliable solution than the method of visual inspection.

Applications

Reticle Stockers

Wafer Steppers

Cleaning Stations

Automatic Handling Systems

Stand-Alone Unit with manual loading

Benefits

Cost-Effectiveness

Easy Operation

High Speed

Low Maintenance

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