EUROIMPIANTI S.p.A.
EUROIMPIANTI S.p.A., incorporated in 1973, became rapidly successful among the producers of integ……...
Automated Particle Detection from Dr. Schenk GmbH
The automated Particle Detection System of Dr. Schenk. Pollux enables fabs to perform a complete inspection on each reticle prior to its use. This approach provides amore cost-effective and more reliable solution than the method of visual inspection.
Applications
Reticle Stockers
Wafer Steppers
Cleaning Stations
Automatic Handling Systems
Stand-Alone Unit with manual loading
Benefits
Cost-Effectiveness
Easy Operation
High Speed
Low Maintenance
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