Preh, Inc.
The Preh Group has always been characterized by its inventiveness. The company, founded in 1919, ……...

The automated Particle Detection System of Dr. Schenk. Pollux enables fabs to perform a complete inspection on each reticle prior to its use. This approach provides amore cost-effective and more reliable solution than the method of visual inspection.
Applications
Reticle Stockers
Wafer Steppers
Cleaning Stations
Automatic Handling Systems
Stand-Alone Unit with manual loading
Benefits
Cost-Effectiveness
Easy Operation
High Speed
Low Maintenance
The Preh Group has always been characterized by its inventiveness. The company, founded in 1919, ……...
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