mPulse® 220 kHz for Ultrasonic Non-Contact Proximity Sensing and Control
The MassaSonic® mPulse® Model M-5000/220 Sensor is a full featured, short range, wired se……...
Automated Particle Detection from Dr. Schenk GmbH
The automated Particle Detection System of Dr. Schenk. Pollux enables fabs to perform a complete inspection on each reticle prior to its use. This approach provides amore cost-effective and more reliable solution than the method of visual inspection.
Applications
Reticle Stockers
Wafer Steppers
Cleaning Stations
Automatic Handling Systems
Stand-Alone Unit with manual loading
Benefits
Cost-Effectiveness
Easy Operation
High Speed
Low Maintenance
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