University of Pittsburgh
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The Merit Sensor RPD Series uncompensated packaged sensor is meant for the application of a broad range of pressures to the sensing element’s backside. The RPD is a flexible platform with exceptional media compatibility. Its small, compact design is perfectly suited for industrial and medical applications.
Company: MEMS piezoresistive pressure sensors are designed and fabricated at Merit Sensor’s Utah, USA engineering and fabrication facility. Merit Sensor focuses on the customization of technically better pressure sensors to solve customers’ pressure sensing requirements for the automotive, industrial, medical, and aerospace industries.
Technology: Merit Sensor utilizes a piezoresistive Wheatstone bridge with a chemically etched silicon diaphragm. The company’s products are all RoHS compliant.
Capabilities: Merit Sensor designs, engineers, fabricates, dices, assembles, and tests their products from a modern facility near Salt Lake City, Utah.
Features
Uncompensated, packaged pressure sensor
Typical average full scale output: 150 mV
Pressure Range: 0 to 500 psi (0 to 34.474 bar)
Temperature Range: -40 °C to +85 °C
Size: 7.6 x 8.9 x 6.6 mm
Media: Air, liquids, and gases (to be determined on an application-by-application basis with Merit engineering team)
Type: Backside gage
Excellent performance in both constant current and constant voltage applications
Designed for a soldered connection to ribbon cable, wires, or flex strip
Simple pressure source attachment and electrical connection
Customization: Pressure port, pressure range
Shipping: Tape and reel
Application Examples
Medical inflation
Industrial process control
Water pressure and flow management
RPD Series Part Number Configurator
Specifications
Parameter | Minimum | Typical | Maximum | Units | Notes |
---|---|---|---|---|---|
Electrical & Environmental | |||||
Excitation (In) | 5 | 15 | V | Maximum: 3 mA | |
Impedance | 4000 | 5000 | 6000 | Ω | |
Operating Temperature | -40 | 85 | °C | Sentium® technology | |
Storage Temperature | -55 | 100 | °C | ||
Performance | |||||
Offset | -10 | 0 | 10 | mV/V | Zero pressure; gage only; @ 25 °C |
Non-linearity | -0.2 | 0 | 0.2 | % FSO | Best Fit Straight Line; @ 25 °C |
Pressure Hysteresis | -0.1 | 0 | 0.1 | % FSO | @ 25 °C |
Temp Coeff – Zero | -25 | 0 | 25 | μV/V/°C | -40 °C to 85 °C |
Temp Coeff – Resistance | 2300 | 2800 | 3300 | PPM/°C | -40 °C to 85 °C |
Temp Coeff – Sensitivity | -1500 | -2200 | -2500 | PPM/°C | -40 °C to 85 °C |
Thermal Hysteresis | -0.1 | 0 | 0.1 | % FSO | Zero pressure |
Burst Pressure | 2X | Room Temperature | |||
Full-Scale Output (@ 5 volts Excitation) | |||||
15 psi (1 bar; 103 KPa) | 60 | 75 | 90 | mV | Closed bridge only |
50 psi (3.4 bar; 345 KPa) | 100 | 125 | 150 | mV | |
100 psi (6.9 bar; 689 KPa) | 120 | 150 | 180 | mV | |
300 psi (20.7 bar; 2068 KPa) | 120 | 150 | 180 | mV | |
500 psi (34.5 bar; 3447 KPa) | 140 | 175 | 210 | mV |
Dimensions (millimeters)
Packaging And Shipping (millimeters)
Electrical
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