Detecting Small Changes in Inclination and Acceleration with Inertial Sensors

First Sensor features an extremely innovative technology system for manufacturing high-precision inertial sensors for condition monitoring, geo-engineering or navigation applications. The MEMS sensors allow for versatile customization to fit the specific application requirements of the user.

Inclinometers and Accelerometers

The capacitive inclinometers and accelerometers are based on single crystal silicon sensor elements and use advanced micromachining technology to realize large signal-to-noise ratios and superior stability over temperature. Thus, they are able to detect very small changes in acceleration or inclination. Because of high aspect ratio microstructures (HARMS), the sensors feature ultra-low cross axis sensitivities. Additionally, the patented highly flexible Air gap Insulated Microstructures (AIM) technology reduces parasitic capacitances.

All inertial sensors can be tailored, and can be adapted or developed to fit specific needs or applications.

Performance Characteristics

Technical Specifications

Inclinometer parameter	SI-11.S1.C-30	Unit
Measurement range	±30	°
Resolution @ 10 Hz	< 0.0015	°
Scale factor (repeatability)	±35	ppm
Scale factor (temperature coefficient)	±50	ppm/K
Bias (repeatability)	±0.0030	°
Bias (temperature coefficient)	±0.0025	°/K
Noise density	< 0.0004	°/√Hz
Measuring frequency	1600	Hz
Digital interface	SPI
Operating temperature	-40 … 85	°C

Technical Specifications

Parameter Accelerometer	SA-12.S1.C-3	SA-13.S1.C-8	SA-14.S1.C-15	Unit
Measurement range	±3	±8	±15	g
Resolution @ 10 Hz	< 40	< 65	< 95	µg
Scale factor (repeatability)	±35	±50	±50	ppm
Scale factor (temperature coefficient)	±50	±50	±50	ppm/K
Bias (repeatability)	±60	±150	±200	µg
Bias (temperature coefficient)	±130	±420	±700	µg/K
Noise density	< 12	< 20	< 30	µg/vHz
Measuring frequency	1600	1600	1600	Hz
Digital interface	SPI	SPI	SPI
Operating temperature	-40 … 85	-40 … 85	-40 … 85	°C

The SI & SA evaluation kits are inertial sensor modules including sensor board, control board and software for simple read-out and quick assessment of the sensor data.

Detecting Small Changes in Inclination and Acceleration with Inertial Sensors

Benefits of the AIM technology

Thin-film free mechanical components, single crystal silicon based

Minimizing of parasitic capacitances due to insulation of the functional components by air gap

Ultra-low cross axis sensitivity due to HARMS technology

Full dry processing

Excellent thermal performance

Large signal-to-noise ratio

Mechanical over-damped to reduce parasitic signals

Customer specific measurement ranges due to flexible adjustment of mass, spring and damping

Features of the Sensor System

Dual axis measurement

Superior stability over temperature

High resolution ADC offering more than 100 dB dynamic range

Digital SPI interface

Configurable bandwidth output filter

Shock survival 1500 g

Customized sensor solutions for packaging and signal processing

Hermetically sealed package

Applications

Navigation

Geo-engineering

Security systems

Condition monitoring

Tilt sensing and leveling

Industrial applications

Platform control and stabilization

标签：Photoresistors Position Sensors

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