Hermary
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Detecting Small Changes in Inclination and Acceleration with Inertial Sensors
First Sensor features an extremely innovative technology system for manufacturing high-precision inertial sensors for condition monitoring, geo-engineering or navigation applications. The MEMS sensors allow for versatile customization to fit the specific application requirements of the user.
Inclinometers and Accelerometers
The capacitive inclinometers and accelerometers are based on single crystal silicon sensor elements and use advanced micromachining technology to realize large signal-to-noise ratios and superior stability over temperature. Thus, they are able to detect very small changes in acceleration or inclination. Because of high aspect ratio microstructures (HARMS), the sensors feature ultra-low cross axis sensitivities. Additionally, the patented highly flexible Air gap Insulated Microstructures (AIM) technology reduces parasitic capacitances.
All inertial sensors can be tailored, and can be adapted or developed to fit specific needs or applications.
Performance Characteristics
Technical Specifications
| Inclinometer parameter | SI-11.S1.C-30 | Unit |
|---|---|---|
| Measurement range | ±30 | ° |
| Resolution @ 10 Hz | < 0.0015 | ° |
| Scale factor (repeatability) | ±35 | ppm |
| Scale factor (temperature coefficient) | ±50 | ppm/K |
| Bias (repeatability) | ±0.0030 | ° |
| Bias (temperature coefficient) | ±0.0025 | °/K |
| Noise density | < 0.0004 | °/√Hz |
| Measuring frequency | 1600 | Hz |
| Digital interface | SPI | |
| Operating temperature | -40 … 85 | °C |
Technical Specifications
| Parameter Accelerometer | SA-12.S1.C-3 | SA-13.S1.C-8 | SA-14.S1.C-15 | Unit |
|---|---|---|---|---|
| Measurement range | ±3 | ±8 | ±15 | g |
| Resolution @ 10 Hz | < 40 | < 65 | < 95 | µg |
| Scale factor (repeatability) | ±35 | ±50 | ±50 | ppm |
| Scale factor (temperature coefficient) | ±50 | ±50 | ±50 | ppm/K |
| Bias (repeatability) | ±60 | ±150 | ±200 | µg |
| Bias (temperature coefficient) | ±130 | ±420 | ±700 | µg/K |
| Noise density | < 12 | < 20 | < 30 | µg/vHz |
| Measuring frequency | 1600 | 1600 | 1600 | Hz |
| Digital interface | SPI | SPI | SPI | |
| Operating temperature | -40 … 85 | -40 … 85 | -40 … 85 | °C |
The SI & SA evaluation kits are inertial sensor modules including sensor board, control board and software for simple read-out and quick assessment of the sensor data.
Benefits of the AIM technology
Thin-film free mechanical components, single crystal silicon based
Minimizing of parasitic capacitances due to insulation of the functional components by air gap
Ultra-low cross axis sensitivity due to HARMS technology
Full dry processing
Excellent thermal performance
Large signal-to-noise ratio
Mechanical over-damped to reduce parasitic signals
Customer specific measurement ranges due to flexible adjustment of mass, spring and damping
Features of the Sensor System
Dual axis measurement
Superior stability over temperature
High resolution ADC offering more than 100 dB dynamic range
Digital SPI interface
Configurable bandwidth output filter
Shock survival 1500 g
Customized sensor solutions for packaging and signal processing
Hermetically sealed package
Applications
Navigation
Geo-engineering
Security systems
Condition monitoring
Tilt sensing and leveling
Industrial applications
Platform control and stabilization
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