ATM-100 Series Atmospheric Wafer Handling Robots from Fantron Technologies
Newly developed and fully backward compatible, the ATM-100, 300 ATM-400 series atmospheric robots……...

The HCL pressure sensors from First Sensor measure ultra-low pressures from 5 mbar and are meant to be used with dry and non-corrosive gases. The sensors are calibrated and temperature compensated. They use a special compensation technology to accomplish a very high offset stability and nearly no position sensitivity.
Upon request, First Sensor can provide custom specific pressure ranges and sensor modifications. Different miniature SMT and SIL housings allow for space-saving PCB-mounting and highest OEM design flexibility.
Common applications include instrumentation, medical devices, HVAC, pneumatic, industrial and environmental controls.
Features
0 ... 5 to 0 ... 75 mbar, differential or gage
Matched pressure port volumes
Miniature SMT and SIL housings
Calibrated and temperature compensated
RoHS compliant
Technical Specifications
| Pressure ranges | Differential/Gage/Vacuum | 0...5 to 0...75 mbar |
| Output signal (typical) at Vs = 12 V | 0...20 mV | |
| Non-linearity and hysteresis (typical, combined) | ± 0.05 %FSO | |
| Pressure connection | tube fitting (Ø 2 mm) | |
| Size without nipples and pins (approx.) | 13 x 16 x 7 mm |
Newly developed and fully backward compatible, the ATM-100, 300 ATM-400 series atmospheric robots……...
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