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OEM Sensor for Harsh Media – HM Series
For over 20 years Merit Sensor Systems has partnered with customers to design, fabricate, assemble and package reliable, economical piezoresistive pressure sensor solutions for automotive, industrial, defense, medical, aviation and consumer applications.
Merit Sensor provides full-service design capabilities, flexible shipping, piezoresistive technology (PRT), in-house wafer fabrication, packaging and assembly, complete pressure measurement (absolute, gage, differential and vacuum) expansive pressure ranges (0.15 psi to 15,000 psi), and unsurpassed operating temperature range (-40 °C to 150 °C) via Merit Sensor’s Sentium® process. Furthermore, Merit Sensor is able to provide unparalleled flexibility to tailor pressure sensing solutions to match customers’ applications.
In contrast to other pressure sensor suppliers, Merit Sensor can offer customers totally customized pressure sensor designs with large or smaller/limited production runs. Merit Sensor’s customers range from pressure sensor transducer manufacturers who are already experts in pressure sensing technology and depend on Merit Sensor for extremely stable and sensitive MEMS sensing elements (bare die), to customers who have limited to no experience in the pressure sensing world and seek Merit Sensor to assist with a totally custom design and implementation of a pressure sensor that ideally fits their application.
At Merit Sensor, Engineers are application experts. They are ready to assist customers design the application to work with a pressure sensor, and/or design a tailored pressure sensing solution that suits a specific application. In case a customer is unsure whether a pressure sensor is right for a particular application, Merit Sensor can help make that choice.
Features
| . | . |
|---|---|
| Type | Absolute; pressurized from cavity side |
| Range | 15 to 500 psi (1 to 34.5 bar; 100 to 3,447 KPa) |
| Media | Air, liquids, and gasses that are compatible with glass and silicon (backside measurement) |
| Flexibility | Sensitivity, bridge, resistance, constraint, etc. |
| Shipping | Wafers on tape |
| Qualification | AEC-Q100 |
Benefits
| . | . |
|---|---|
| Cost | Due to high-performing die, money is saved over time |
| Performance | Enjoy best-in-class performance due to Merit’s proprietary Sentium technology |
| Speed | Get to market quickly with flexible and creative solutions |
| Security | Feel confident doing business with a qualified company supported by a solid parent company (NASDAQ: MMSI) |
| Service | Experience prompt, professional and personal support |
Specifications
| Parameter | Minimum | Typical | Maximum | Units | Notes |
|---|---|---|---|---|---|
| Electrical & Environmental | |||||
| Excitation | 5 | 15 | V | Maximum: 3 mA | |
| Impedance | 4000 | 5000 | 6000 | Ω | Optional: 3,500 +/- 500 |
| Operating Temperature | -40 | 150 | °C | Sentium® technology | |
| Storage Temperature | -55 | 160 | °C | ||
| Performance | |||||
| Offset | -10 | 0 | 10 | mV/V | Zero pressure; gage only; @25 °C |
| Non-linearity | -0.2 | 0 | 0.2 | % FSO | Best Fit Straight Line; @25 °C |
| Pressure Hysteresis | -0.1 | 0 | 0.1 | % FSO | @25 °C |
| Temp Coeff – Zero | -25 | 0 | 25 | µV/V/°C | -40 °C to 150 °C |
| Temp Coeff – Resistance | 2300 | 2800 | 3300 | PPM/°C | -40 °C to 150 °C |
| Temp Coeff – Sensitivity | -1500 | -2200 | -2500 | PPM/°C | -40 °C to 150 °C |
| Long-Term Stability | -0.2 | 0 | 0.2 | % FSO | |
| Burst Pressure | 5X | Full scale pressure | |||
| Burst Pressure (500 psi part) | 1500 | psi | |||
| Full-Scale Output (@ 5 volts) Other outputs available upon request | |||||
| 100 psi (6.9 bar; 689 KPa) | 120 | 150 | 180 | mV | |
| 300 psi (20.7 bar 2,068 KPa) | 110 | 135 | 160 | mV | |
| 500 psi (34.5 bar 3,447 KPa) | 140 | 175 | 210 | mV | |
MEMS Pressure Elements Applications
Part Details
Dimensions (millimeters, post-cut)
Side View
Electrical
Part Number Configurator
Standard Part Numbers
H1T-0300-L2T
H1C-0300-L2T
H1T-0090-L2T
H1C-0090-L2T
H1T-0070-L2T
H1C-0070-L2T
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