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PR-PD4 FPD Mask Particle Detection System from HORIBA, Ltd.
Featuring a high net working rate and stability over the long term, the HORIBA PD Series has attained a solid reputation in semiconductor fabrication plants. Redesigned in a package for FPD Mask, the PR-PD4 inherits high-performance features such as a simple mask pallet for stable long-term operation, reliable optics, and the ability to counter erroneous detection.
It is very versatile with adetection sensitivity of 0.5ìm, as well as it boasts low running cost, The new PR-PD3 offers simplicity and yet meets wide ranging needs in applications involving the measurement of particles on FPD masks.
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