Razor Atmospheric Transfer Robot from Brooks Automation, Inc.

Stay on the cutting edge with Brooks’ Razor atmospheric transfer robots. Razor robotics provide the superior performance, reliability, and ultra-cleanliness required for today’s advanced semiconductor manufacturing. Leveraging Brooks’ kinematic mounting system, patented motional control technology, and reliable direct drive robotics, Razor robots enable fast set-up, high repeatability, and maximum uptime. In addition, Razor features a simplified, highly efficient arm architecture with two links instead of three for a 3-FOUP trackless robot that delivers reliable performance—even in high-volume, 24x7 production environments.

Features:

Proprietary motion control algorithms—Time Optimized Trajectory and Time Optimal Path—significantly reduce vibration

Support for a choice of wafer handling technologies, including high throughput Passive Edge Contact

Fifth generation direct drive technology

Drag-and-Drop Sequence Editor for customization of motion and I/O sequences

Compatibility with Equipe and Reliance robots

Optional kinematic mounting system with one-time height and level adjustment