Capacitive Displacement, Distance and Position Sensors

Micro-Epsilon’s capacitive sensors have established themselves in numerous different applications over several years. Dependable technology allows the sensors to be employed in safety-critical areas. Over 25 basic sensors with measuring ranges from 50 µm to 10 mm cover many fields of application. These sensor versions are available as cylindrical models with a connector, as well as with in-built cable, in PCB designs, and as a flat sensor.

Unique Sensor Design/Probe Design

The totally triaxial sensor design is unique for capaNCDT sensors (also referred to as probes), where the guard-ring electrode and the grounding are also positioned on the sensor’s front edge as well as the measurement electrode. This means capacitive probes can also be set up totally flush in conductive materials. The capacitive measurement probes can also make contact with each other in the case of multi-channel measurements. Intrusion of the measuring field is reliably prevented by the capacitive sensor’s triaxial design.

High Stability

Compared to other non-contact measurement methods, capacitive displacement measurement offers high level of precision and stability of measurements. As thermally induced conductivity variations of the measuring object do not have any impact on measurements, the principle is also dependable even with instabilities in temperature. In addition to temperature stability, the long-term stability guarantees consistent operation spanning many years. In several companies, Micro-Epsilon’s capacitive sensors have functioned reliably even after many years of use, without having to substitute any components or parts. This means that replacement and maintenance costs are reduced.

Measurement Modes

Displacement measurement on electrical conductors, for example, metals

One-sided thickness measurement of insulators, for example, plastic coating

Two-sided thickness measurement of electrically conductive materials, for example, silicon wafer

Measurement on All Surfaces

Since the measurement can be performed with all conductive objects, there is no interference caused by, for example, the optical features of the target. Thus, even transparent and reflecting surfaces can be detected at the highest precision.

Non-conductive measurement objects: plastics (also GFRP, glass fiber-reinforced plastic), oils, steatite, porcelain, ceramics, adhesives, resins, glass, gelatin

Conductive measurement objects: silicon, graphite, metals, CFK, water

Capacitive sensors - operating principle and applicationsPlay