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Low Pressure Sensor for High Volumes – J Series
For over 20 years Merit Sensor Systems has partnered with customers to design, fabricate, assemble and package reliable, economical piezoresistive pressure sensor solutions for automotive, industrial, defense, medical, aviation and consumer applications.
Merit Sensor offers full-service design capabilities, piezoresistive technology (PRT), in-house wafer fabrication, packaging and assembly, flexible shipping, complete pressure measurement (absolute, differential, gage and vacuum) expansive pressure ranges (0.15 psi to 15,000 psi), and unsurpassed operating temperature range (- 40 °C to 150 °C) via Merit Sensor’s Sentium® process. Furthermore, Merit Sensor is able to provide unparalleled flexibility to tailor pressure sensing solutions to match customers’ applications.
In contrast to other pressure sensor suppliers, Merit Sensor can offer customers totally customized pressure sensor designs with large or smaller/limited production runs. Merit Sensor’s customers range from pressure sensor transducer manufacturers who are already experts in pressure sensing technology and depend on Merit Sensor for extremely stable and sensitive MEMS sensing elements (bare die), to customers who have limited to no experience in the pressure sensing world and seek Merit Sensor to assist with a totally custom design and implementation of a pressure sensor that ideally fits their application.
At Merit Sensor, Engineers are application experts. They are ready to assist customers design the application to work with a pressure sensor, and/or design a tailored pressure sensing solution that suits a specific application. In case a customer is unsure whether a pressure sensor is right for a particular application, Merit Sensor can help make that choice.
Features
| . | . |
|---|---|
| Media | Clean, dry air and non-corrosive gases |
| Range | 3 to 300 psi (0.21 to 21 bar; 21 to 2100 KPa) |
| Type | Absolute, gage, differential and vacuum |
| Flexibility | Sensitivity, resistance, bridge, constraint, etc. |
| Shipping | Wafers on tape, waffle pack |
Benefits
| . | . |
|---|---|
| Performance | Enjoy best-in-class performance due to Merit’s proprietary Sentium technology |
| Security | Feel confident doing business with an experienced company supported by a solid parent company (NASDAQ: MMSI) |
| Speed | Get to market quickly with 1 single geometry that supports a wide pressure range (3 to 300 psi and up to 1000 psi optional) |
| Cost | Due to high-performing die, money is saved over time |
| Service | Experience quick, professional and personal support |
Specifications (Preliminary)
| Parameter | Minimum | Typical | Maximum | Units | Notes |
|---|---|---|---|---|---|
| Electrical & Environmental | |||||
| Excitation | 1.5 | mA | Maximum: 3 mA | ||
| Impedance | 4000 | 5000 | 6000 | Ω | Optional: 3,500 ± 500 |
| Operating Temperature | -40 | 150 | °C | Sentium® technology | |
| Storage Temperature | -55 | 160 | °C | ||
| Performance | |||||
| Offset | -5 | 0 | 5 | mV/V | Zero pressure; gage only; @25 °C |
| Non-linearity | -0.15 | 0 | 0.15 | % FSO | Best Fit Straight Line; @25 °C |
| Pressure Hysteresis | -0.1 | 0 | 0.1 | % FSO | @25 °C |
| Temp Coeff – Zero | -25 | 0 | 25 | µV/V/°C | -40 °C to 150 °C |
| Temp Coeff – Resistance | 2500 | 3000 | 3500 | PPM/°C | -40 °C to 150 °C |
| Temp Coeff – Sensitivity | -1500 | -2000 | -2500 | PPM/°C | -40 °C to 150 °C |
| Thermal Hysteresis | -0.2 | 0 | 0.2 | % FSO | Zero pressure -40 °C to 150 °C |
| Long-Term Stability | -0.2 | 0 | 0.2 | % FSO | Zero pressure |
| Burst Pressure | 5X | Full scale pressure | |||
| Full-Scale Output (@ 1.5 mA excitation) | |||||
| 3 psi (0.21 bar; 21 kPa) | 95 | 120 | 145 | mV | Other outputs available upon request |
| 5 psi (0.34 bar; 34 kPa) | 95 | 120 | 145 | mV | |
| 15 psi (1 bar; 103 kPa) | 95 | 120 | 145 | mV | |
| 30 psi (2 bar; 207 kPa) | 95 | 120 | 145 | mV | |
| 50 psi (3.5 bar; 345 kPa) | 95 | 120 | 145 | mV | |
| 100 psi (7 bar; 670 kPa) | 95 | 120 | 145 | mV | |
| 150 psi (10 bar; 1035 kPa) | 95 | 120 | 145 | mV | |
| 300 psi (21 bar; 2070 kPa) | 95 | 120 | 145 | mV | |
MEMS Pressure Elements Applications
Part Details
Dimensions (millimeters, post-cut)
Electrical
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